엘엠에스 주식회사

Smart Choice For The Future

엘엠에스는 전기광학특성을 측정하는 측정 장비 분석 / 평가 시스템을 개발 공급하는
Light & Display Evaluation System 전문 공급 업체입니다.

Laser Cleaning Solution

  • Products
  • Laser Cleaning Solution

Laser Cleaning Solution

Dry Laser Cleaning Solution for Semi-Conductor

Using the World's First Short Pulse Mid-IR Fiber Laser
카탈로그 다운로드
High-precision laser cleaning powered by the only 3µm pulsed fiber lasers on the market

Benefits

  • Time-saving
  • Productivity improvement
  • Process automation
  • Efficient and accurate process

Advantages

  • Robust software integration in DMC.
  • Quickly integrates through partners such as Ficontec.
  • Less manipulation which reduce QA inspection rejections.
  • On-site installation, reducing part handling.
  • 2.8um enables selective removal of organic residues while preserving the substrate.

Why our dry laser cleaning solution is better?

 

 

Current cleaning methods, like ultrasonic baths and repeated validations, do not always remove all residues, which lead to QA inspection rejections.

Also, these manual processes increase the risk of wafer breakage and result in efficiency losses.

 

- Dust particles

- Isopropanol residue

- Organic removal

목록으로